Introduction to Microlithography - Second Edition
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Introduction to Microlithograp
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Condition:
Brand New
A new, unread, unused book in perfect condition with no missing or damaged pages. See the seller’s listing for full details.
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Located in: Rio Rancho, New Mexico, United States
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Estimated between Sat, Jul 19 and Wed, Jul 23 to 94104
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eBay item number:325788943926
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Item specifics
- Condition
- Subject Area
- Microlithography
- Educational Level
- Adult & Further Education
- Personalized
- No
- Level
- Beginner, Intermediate
- Country/Region of Manufacture
- United States
- Subject
- Microlithography
- ISBN
- 9780841228481
About this product
Product Identifiers
Publisher
American Chemical Society
ISBN-10
0841228485
ISBN-13
9780841228481
eBay Product ID (ePID)
938058
Product Key Features
Number of Pages
540 Pages
Language
English
Publication Name
Introduction to Microlithography
Subject
Electronics / Semiconductors, Chemistry / Physical & Theoretical, Chemistry / Organic, Industrial Technology
Publication Year
1994
Features
Revised
Type
Textbook
Subject Area
Technology & Engineering, Science
Series
Acs Professional Reference Book Ser.
Format
Hardcover
Dimensions
Item Height
1.4 in
Item Weight
30.5 Oz
Item Length
9.1 in
Item Width
6.2 in
Additional Product Features
Edition Number
2
Intended Audience
College Audience
LCCN
93-042023
Dewey Edition
20
Dewey Decimal
621.3815/31
Edition Description
Revised edition
Table Of Content
L.F. Thompson: An Introduction to LithographyM.J. Bowden: The Lithographic Process: The PhysicsC.G. Willson: Organic Resist MaterialsL.F. Thompson: Resist ProcessingJ.A. Mucha, D.W. Hess, and E.S. Aydil: Plasma Etching
Synopsis
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography., Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also proveinvaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography., Updated and expanded Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
LC Classification Number
TR940.I57 1994
Item description from the seller
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- c***p (494)- Feedback left by buyer.Past yearVerified purchaseSecurely packaged in sturdy cardboard and wrapped to keep safe from water, delivered quickly in two days, condition is like new as described, excellent seller - thank you!A Field Guide to Good Decisions Values in Action by Joan McIver Gibson and (#324420477202)
- *****- Feedback left by buyer.Past 6 monthsVerified purchaseExactly as described; arrived quickly and packaged well; best value among others I priced. Thanks so much! 😊
- t***a (226)- Feedback left by buyer.Past 6 monthsVerified purchaseExcellent seller!! Well-packaged book arrived as described, fast shipping. Great customer service. I highly recommend this seller!!Work a Day Life of the Pueblos By Ruth Underhill PH. D. (#225923847898)
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Seller feedback (1,046)
This item (1)
All items (1,046)
- c***p (494)- Feedback left by buyer.Past yearVerified purchaseSecurely packaged in sturdy cardboard and wrapped to keep safe from water, delivered quickly in two days, condition is like new as described, excellent seller - thank you!A Field Guide to Good Decisions Values in Action by Joan McIver Gibson and (#324420477202)
- *****- Feedback left by buyer.Past 6 monthsVerified purchaseExactly as described; arrived quickly and packaged well; best value among others I priced. Thanks so much! 😊
- t***a (226)- Feedback left by buyer.Past 6 monthsVerified purchaseExcellent seller!! Well-packaged book arrived as described, fast shipping. Great customer service. I highly recommend this seller!!Work a Day Life of the Pueblos By Ruth Underhill PH. D. (#225923847898)